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Friday, July 24, 2020 | History

2 edition of Studies of glow discharge oscillations and jet-enhanced cathodic sputtering found in the catalog.

Studies of glow discharge oscillations and jet-enhanced cathodic sputtering

Zhubiao Zhu

Studies of glow discharge oscillations and jet-enhanced cathodic sputtering

by Zhubiao Zhu

  • 168 Want to read
  • 24 Currently reading

Published .
Written in

    Subjects:
  • Glow discharges.,
  • Sputtering (Physics)

  • Edition Notes

    Statementby Zhubiao Zhu.
    The Physical Object
    Pagination126 leaves, bound :
    Number of Pages126
    ID Numbers
    Open LibraryOL15380444M

    The importance of gaining knowledge on the fundamental processes in glow discharges in the field of the signal generation, the sputtering phenomena taking place in the case of solids and the analyte breakdown in the excitation of gases is treated. For gaining more knowledge on the plasma processes diagnostics including temperature and electron number density as well as gas and analyte atom and. The glow discharge may also be operated by using a pulsed current source. This is the pulsed glow discharge, which consists of short glow discharges (with time lengths typically in the milli- or microsecond range), followed by an afterglow, which is generally characterized by a longer time-period.

    Sputter Coaters and SEM/ TEM Carbon Coaters Glow Discharge for TEM and Surface Modification Cryo-SEM Preparation Systems PP QuickLok Ambient Transfer System Critical Point Dryers Freeze Dryers for Sample Preparation RF Plasma Etchers / Plasma Reactors Bench-Top Vacuum Evaporators Peltier Cooling Stages for SEM Sputter Targets Carbon. Electrical Oscillations in a D.C. Glow Discharge nomena in the cathode dark space are affected when electrical oscillations are present in the discharge tube. w 2. EXPERIMENTAL The discharge tube used was 35 mm. in diameter and was provided with an aluminium cathode.

    Aronsson BO(1), Lausmaa J, Kasemo B. Author information: (1)Department of Applied Physics, Chalmers University of Technology, Göteborg, Sweden. Glow discharge plasma treatment is a frequently used method for cleaning, preparation, and modification of biomaterial and .   A Glow Discharge Optical Emission Spectrometer (GD-OES) is built of a glow discharge source and one or more optical spectrometers, including detectors, either Photomultiplier tubes or solid state detectors, usually CCD's.A schematic layout is given to the above. The spectrometer displayed here using a concave grating in the Rowland circle or Paschen-Runge configuration and .


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Studies of glow discharge oscillations and jet-enhanced cathodic sputtering by Zhubiao Zhu Download PDF EPUB FB2

Three aspects of glow discharges have been studied: glow discharge oscillations, sputtering, and coupling between cathode and anode regions the two most important regions in a glow discharge. Cathode and anode processes are tightly coupled by electron and ion coupling : Zhubiao Zhu.

A SPAN model of glow discharge oscillation is proposed: source\ud formation, propagation, accumulation, and neutralization of space charges. Electrode coupling couples the neutralization and source formation processes thus completing the feedback loop necessary for some of the observed oscillations to occur.

Four modes of oscillations were found. Title: Studies of Glow Discharge Oscillations and Jet-enhanced Cathodic Sputtering Abstract approved: Edward H. Piepmeier Three aspects of glow discharges have been studied: glow discharge oscillations, sputtering, and coupling between cathode and anode regions the two most important regions in a glow discharge.

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge.

Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

This preliminary study investigates the e ects of low pressure glow-discharge treatments, performed with a nitrogen containing gas mixture, on the surface modification of AISI austenitic stainless steel. These treatments can be considered similar to cathodic sputtering, since they activateAuthor: Francesca Borgioli, Emanuele Galvanetto, Tiberio Bacci.

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals.

Subjects range from voltage, distributions encountered in plasma etching systems to plasma 3/5(1). IEEE Xplore. Delivering full text access to the world's highest quality technical literature in engineering and technology.

STUDIES IN DC GLOW DISCHARGE SYSTEM R. KUMAR1* and R. NARAYANAN2. Department of Applied Sciences, Meerut Institute of Engineering and Technology, Meerut, India *E-mail: @ B.

Reactive sputtering When the glow discharge is established in the presence of a suitable gas, films consisting of a reaction product of the gas and the target material may be deposited.

In this reactive sputtering mode, the relation between V and J can be more complex than in a noble gas discharge. quency (i.e., GHz) is applied to the discharge, a resonance they sputter away cathode (target) atoms. The latter arrive in the plasma and can be deposited on the substrate.

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge.

Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to s: 4.

Principle of the glow discharge and its use for mass spectrometry. A glow discharge is a kind of plasma, i.e. a partially ionized gas, consisting of positive ions and electrons, and a large number of neutral atoms. It is formed when a cell, consisting of an anode and a cathode, is filled with a gas at low pressure (e.g.

1 torr; 1 TORR = Pa). This option allows users to search by Publication, Volume and Page Selecting this option will search the current publication in context. Selecting this option will search all publications across the Scitation platform Selecting this option will search all publications for the Publisher/Society in context.

A review is given of glow discharge techniques which are useful for conditioning vacuum vessels for high‐vacuum applications.

Substantial development of glow discharge techniques has been done for the purpose of in situ conditioning of the large ultrahigh vacuum systems for particle accelerators and magnetic fusion devices.

In these applications the glow discharge treatments remove. Sputtering is useful when using spectroscopy to analyze the composition of the cathode, as is done in Glow-discharge optical emission spectroscopy.

However, sputtering is not desirable when glow discharge is used for lighting, because it shortens the life of the lamp. A glow-discharge decomposition apparatus comprises ground electrodes, substrates, RF-electrodes, a RF-power supply, a matching circuit and a controlling circuit having at least one electric element.

Each of the substrates is provided on the ground electrodes which are placed over each of the RF-electrodes in parallel to each other.

Each of the RF-electrodes standing in parallel are. An experimental study has been made of the properties and characteristics of a glow discharge to a nearly spherical hollow cathode. Current densities in excess of amp/cm2 can be drawn from the cathode with negligible deterioration from sputtering.

In neon, the discharge exhibits a stable and reproducible negative volt‐ampere characteristic at currents of a few milliamperes. Determination of Bromine in Flame-Retardant Plastics Using Pulsed Glow Discharge Mass Spectrometry.

Analytical Chemistry75 Pulsed and transient modes of atomization by cathodic sputtering in a glow discharge for atomic absorption spectrometry. Fundamental studies of a gas-jet-enhanced sputtering system for atomic spectroscopy.

A 'read' is counted each time someone views a publication summary (such as the title, abstract, and list of authors), clicks on a figure, or views or downloads the full-text.

An experimental study has been made of the properties and characteristics of a glow discharge to a nearly spherical hollow cathode. Current densities in excess of amp/cm 2 can be drawn from the cathode with negligible deterioration from sputtering.

In neon, the discharge exhibits a stable and reproducible negative volt‐ampere characteristic at currents of a few milliamperes. Creation of glow-discharge.

Tube filled with argon, neutral, no charged particales between cathode and anode Elastic collision, no energy exchange Inelastic collision. Energy not enough high, excite electrons, emitting photons Energy high enough, ionize electrons, cause secondary free electrons. Glow discharge optical emission spectroscopy (GDOES) is an essential technique for the direct analysis of bulk solids, for elemental surface analysis and for the depth profiling of thin films and industrial coatings.

The technique has shown rapid growth in numbers of instruments, in breadth of applications, in improved quantification in recent years and is now a recognised technique within the.Abstract.

The classical one dimensional approach of cathodic glow discharge is extended into a two dimensional time dependent model. A radial ion transport equation is .